Evaporation characteristics of Sb thin films in the vicinity of St707 getter material

A model is presented that describes the pumping characteristics of St707 getter material, the evaporation rate of antimony, and the resulting partial pressure of Sb within a vacuum chamber. The results show that within the 250-450◦C range, the partial pressure of antimony ranges from 10−7 Pa to 10−2 Pa. In a limiting case where the getter efficiency is tuned to 10, 000 L/s, partial pressures are still just barely breaching UHV boundaries (about 10−7 Pa). Thus, the getter has little effect with respect to Antimony evaporation due to the dominating Sb recombination rate term.